The nonmagnetic element Ca-doped LiNbO3 films were prepared on Si(111) substrates by radio frequency(RF) magnetron sputtering technique. X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS) indicate that the Ca atoms enter the LiNbO3 lattice in the form of Ca2+ ions. Superconducting quantum interference device(SQUID) results show that the Ca-doped LiNbO3 films have room-temperature ferromagnetism and a maximum saturation magnetization of 4800 A/m at the 3% of Ca atom doping concentration. The room temperature ferromagnetism of the Ca-doped LiNbO3 films can be attributed to the occurrence of vacancies due to Ca doping and is the intrinsic property.
