An optical readout uncooled infrared (IR) imaging detector of bimaterial cantilever array using knife-edge filter operation (KEFO) is demonstrated. The angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10-5 degree. A deformation magnifying substrate-free micro-cantilever unit with multi-fold interval metallized legs is specially designed and modeled. A FPA with 160×160 pixels is fabricated and thermal images with noise equivalent temperature difference (NETD) of 400 mK are obtained by this imaging detector.
ZHANG QMIAO ZGUO ZDONG FXIONG ZWU XCHEN DLI CJIAO B
