Nanolithography is a patterning technique for the fabrication of nano-scale structures.A promising method of nanolithography known as scanning probe lithography has particularly extensive applications for its high resolution,high reliability,and simple operation.In this paper,a novel electrothermally actuated cantilever with integrated heater,thermal conductor and actuator for scanning probe lithography is proposed.Cantilevers are designed in an 8×4 array.Analytical models are presented to simulate the temperature distribution,deflection and thermal crosstalk of the cantilever array.This structure is successfully fabricated.It is demonstrated that this structure can produce a tip deflection of 16.9 μm at an actuation current of 5.5 mA and the thermal crosstalk between the cantilevers is neglected.
FU JianYu,CHEN DaPeng & YE TianChun Integrated Circuit Advanced Process Center,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China
基于无线物联网架构,提出了一种可实现车路信息实时采集、共享的宽视野图像信息系统。该系统应用GPS全球定位系统采集位置信息,使用图像传感器获得车辆周围图像;通过无线车辆网络将数据汇总;最后通过图像拼接算法构建宽视野图像信息。针对系统中的核心部分——构建宽视野图像信息,提出了一种基于SURF(speeded up robust features)图像特征的图像拼接算法。实验证明,该算法时间复杂度低,拼接效果良好,且系统具有良好的扩展性,可用于进一步开发车联网的智能应用。
