With a comprehensive consideration of multiple product types, past-sequence-dependent （ p-s-d ） setup times, and deterioration effects constraints in processes of wafer fabrication systems, a novel scheduling model of multiple orders per job（MOJ） on identical parallel machines was developed and an immune genetic algorithm（IGA） was applied to solving the scheduling problem. A scheduling problem domain was described. A non-linear mathematical programming model was also set up with an objective function of minimizing total weighted earliness-tardlness penalties of the system. On the basis of the mathematical model, IGA was put forward. Based on the genetic algorithm （GA）, the proposed algorithm （IGA） can generate feasible solutions and ensure the diversity of antibodies. In the process of immunization programming, to guarantee the algorithm＇s convergence performance, the modified rule of apparent tardiness cost with setups （ATCS） was presented. Finally, simulation experiments were designed, and the results indicated that the algorithm had good adaptability when the values of the constraints＇ characteristic parameters were changed and it verified the validity of the algorithm.
Overhead-hoist-transporters (OHTs) have become the most appropriate tools to transport wafer lots between inter-bay and intra-bay in united layouts of automated material handling systems (AMHSs) in 300 mm semiconductor wafer fabrications. To obtain a conflict-free scheduling solution, an intelligent multi-agent-based control system framework was built to support the AMHSs. And corresponding algorithms and rules were proposed to implement cooperation among agents. On the basis of the mentioned above, a time-constraint-based heuristic scheduling algorithm was presented to support the routing decision agent in searching the conflict-free shortest path. In the construction of the algorithm, the conflicted intervals of the k-shortest-route were identified with the time window theory. The most available path was chosen with an objective of the minimum completion time. The back tracking method was combined to finish the routing scheduling. Finally, experiments of the proposed method were simulated. The results show that the multi-agent framework is suitable and the proposed scheduling algorithm is feasible and valid.
In order to enhance the utilization of single-ann cluster tools and optimize the scheduling problems of dynamic reaching wafers with residency time and continuous reentrancy constraints, a structural heuristic scheduling algorithm is presented. A nonlinear programming scheduling model is built on the basis of bounding the scheduling problem domain. A feasible path search scheduling method of single-arm robotic operations is put forward with the objective of minimal makespan. Finally, simulation experiments are designed to analyze the scheduling algorithms. Results indicate that the proposed algorithm is feasible and valid to solve the scheduling problems of multiple wafer types and single-ann clusters with the conflicts and deadlocks generated by residency time and continuous reentrancy constraints.
To make equipment maintenance policies more suitable to real operations, a fuzzy logic-based modeling method of deciding maintenance policies was proposed in this paper. Five maintenance policies which are built with downtime and breakdown frequency as decision criteria are discussed. To decide efficiently maintenance policies, the decision criteria are divided into low, medium, and high levels. On the basis of the levels, fuzzy sets and membership functions of the decision criteria are established with a fuzzy logic theory. A fuzzy logic algorithm of solving overall degree of satisfaction is presented to select the most efficient maintenance policy for equipment. Finally, the modeling method is tested. Experiment results show that the proposed method can solve efficiently problems of the traditional decision-making bias, and it is more valid and practical than the method of traditional decision-making grid (DMG).
To improve overall equipment efficiency(OEE) of a semiconductor wafer wet-etching system,a heuristic tabu search scheduling algorithm is proposed for the wet-etching process in the paper,with material handling robot capacity and wafer processing time constraints of the process modules considered.Firstly,scheduling problem domains of the wet-etching system(WES) are assumed and defined,and a non-linear programming model is built to maximize the throughput with no defective wafers.On the basis of the model,a scheduling algorithm based on tabu search is presented in this paper.An improved Nawaz,Enscore,and Ham(NEH) heuristic algorithm is used as the initial feasible solution of the proposed heuristic algorithm.Finally,performances of the proposed algorithm are analyzed and evaluated by simulation experiments.The results indicate that the proposed algorithm is valid and practical to generate satisfied scheduling solutions.
To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presented for continuous flow transporters (CFTs) . In the modeling procedure which considered layout of crossovers and the variability of service time of turntables, an M /G /1 queuing model with multi-class customers and a non-preemptive priority M /G /1 queuing model with multi-class customers were introduced to accurately present the queuing WIP of each material intersection point and perform the analytical model. Finally,300 mm wafer fabrication facilities (fabs)with 24 bays were applied to evaluating the proposed model. Compared with results of an Arena simulation, the model performs well in evaluating the number of queuing WIP of the intersection points and overall system of CFTs in AMHSs.
