The high power EUV source is one of key issues in the development of EUV lithography which is considered to be the most promising technology among the next generation lithography.However neither DPP nor LPP seems to meet the requirements of the commercial high-volume product.Insufficiency of DPP and LPP motivate the investigation of other means to produce the EUV radiation required in lithography.ECR plasma seems to be one of the alternatives.In order to investigate the feasibility of ECR plasma as a EUV light source,the EUV power emitted by SECRAL was measured.A EUV power of 1.03W in 4~ sr solid angle was obtained when 2000W 18GHz rf power was launched,and the corresponding CE was 0.5%.Considering that SECRAL is designed to produce very high charge state ions,this very preliminary result is inspiring. Room-temperature ECR plasma and Sn plasma are both in the planned schedule.
The axial emitted bremsstrahlung spectra were measured on SECRAL(Superconducting ECR ion source with Advanced design in Lanzhou)using an HPGe detector.The spectral temperature T_(spe) was obtained from the linear fit of the spectra in the semi-log present.The evolution of T_(spe) with microwave power and magnetic field configuration is investigated in this paper.
Helicon plasma sources are known as efficient generators of uniform and high density plasma. A helicon plasma source was developed for the investigation of plasma stripping and plasma lenses at the Institute of Modern Physics, CAS. In this paper, the characteristics of helicon plasma have been studied by using a Langmuir four-probe and a high plasma density up to 3.9× 10^13/cm^3 has been achieved with the Nagoya type III antenna. In the experiment, several important phenomena were found： （1） for a given magnetic induction intensity, the plasma density became greater with the increase of RF power; （2） helicon mode appeared at RF power between 300 W and 400 W; （3） the plasma density gradually tended to saturation as the RF power increased to the higher power; （4） a higher plasma density can be obtained by a good match between the RF power and the magnetic field distribution. The key issue is how to optimize the matching between the RF power and the magnetic field. Moreover, some tests on the extraction of ion beams were performed, and preliminary results are given. The problems which existed in the helicon ion source will be discussed and the increase in beam density will be expected by extraction system optimum.
A Superconducting ECR ion source with Advanced design in Lanzhou (SECRAL) was successfully built to produce intense beams of highly charged ions for Heavy Ion Research Facility in Lanzhou (HIRFL).The ion source has been optimized to be operated at 28GHz for its maximum performance.The superconducting magnet confinement configuration of the ion source consists of three axial solenoid coils and six sextupole coils with a cold iron structure as field booster and clamping.For 28GHz operation,the magnet assembly can produce peak mirror fields on axis 3.6T at injection,2.2T at extraction and a radial sextupole field of 2.0T at plasma chamber wall.A unique feature of SECRAL is that the three axial solenoid coils are located inside of the sextupole bore in order to reduce the interaction forces between the sextupole coils and the solenoid coils. During the ongoing commissioning phase at 18GHz with a stainless steel chamber,tests with various gases and some metals have been conducted with microwave power less than 3.2kW and it turned out the performance is very promising.Some record ion beam intensities have been produced,for instance,810eμA of O^(7+),505eμA of Xe^(20+),306eμA of Xe^(27+),21eμA of Xe^(34+),2.4eμA of Xe^(38+) and so on.To reach better results for highly charged ion beams,further modifications such as an aluminium chamber with better cooling,higher microwave power and a movable extraction system will be done,and also emittance measurements are being prepared.
