YBa2Cu3O7-d (YBCO)-coated conductors havewide-ranging potential in large-scale applications such assuperconducting maglev trains and superconducting electriccables, but low current carrying capability restrains thepractical application of YBCO-coated conductors at hightemperatures and high magnetic fields. It is crucial todevelop YBCO-coated conductors with high critical currentdensity. In this paper, epitaxial, dense, smooth, andcrack-free Fe-doped YBCO films were prepared on aLaAlO3 single crystal substrate via a fluorine-free polymerassistedmetal organic deposition method. The effects ofthe dilute Fe doping on microstructure and superconductingcharacter of YBCO films were investigated. The criticaltemperature for superconducting of the Fe-dopedYBCO films decreases slightly. However, the in-fieldcritical current density of YBCO films improves with diluteFe doping of amounts less than x = 0.005, compared to thepure YBCO film. Therefore, the current carrying capabilityof YBCO film can improve by doping with appropriateamounts of Fe. This means that dilute Fe doping in YBCOfilms may be a feasible way to prepare high-performancecoated conductors.