Owing to the absence of proper analytical solution of cantilever beams for couple stress/strain gradient elasto-plastic theory, experimental studies of the cantilever beam in the micro-scale are not suitable for the determination of material length-scale. Based on the couple stress elasto-plasticity, an analytical solution of thin cantilever beams is firstly presented, and the solution can be regarded as an extension of the elastic and rigid-plastic solutions of pure bending beam. A comparison with numerical results shows that the current analytical solution is reliable for the case of σ0 〈〈 H 〈〈 E, where σ0 is the initial yield strength, H is the hardening modulus and E is the elastic modulus. Fortunately, the above mentioned condition can be satisfied for many metal materials, and thus the solution can be used to determine the material length-scale of micro-structures in conjunction with the experiment of cantilever beams in the micro-scale.