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国家自然科学基金(10772086)

作品数:5 被引量:7H指数:1
相关作者:康新何小元苏岩施芹裘安萍更多>>
相关机构:南京理工大学东南大学无锡中微高科电子有限公司更多>>
发文基金:国家自然科学基金江苏省“青蓝工程”基金江苏省自然科学基金更多>>
相关领域:一般工业技术机械工程理学化学工程更多>>

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硅微陀螺仪器件级真空封装被引量:5
2009年
为实现硅微陀螺仪真空封装以提高其性能,对硅微陀螺仪器件级真空封装技术进行研究。首先,设计硅微陀螺仪的专用陶瓷封装管壳,并采用钎焊技术进行封帽,采用金锑合金为焊料以满足封装过程中的高温。分析除气工艺对硅微陀螺仪品质因数的影响,除气试验结果表明,将硅微陀螺仪芯片和封装壳体放置在真空炉中进行高温烘烤,能有效地提高硅微陀螺仪的品质因数。制定硅微陀螺仪器件级真空封装的工艺流程,封装好的硅微陀螺仪的品质因数约为10363.7,约为空气下的50倍。硅微陀螺仪品质因数跟踪测试结果表明,真空封装的硅微陀螺仪存储5个月后,其品质因数降低为最初的55.1%,这表明采用该器件级真空封装技术封装的硅微陀螺仪的真空保持度较差,有待进一步研究。
施芹丁荣峥苏岩裘安萍
关键词:硅微陀螺仪品质因数
显微干涉法在MEMS结构三维形貌测试中的应用
2009年
鉴于三维形貌在微机电系统(MEMS)测试领域的重要地位及显微干涉法在光学计量领域的高精度性能,开展了显微干涉法在MEMS结构三维形貌测试中的应用研究.基于小波变换极高的去噪性能及处理无载波条纹的优点,包裹相位采用连续小波变换的方法提取.基于展开相位拐点与符号歧义点的单应性,开展了通过检测展开相位拐点并对展开相位进行校正的方法恢复非单调条纹图的真实相位的研究.采用上述方法,成功测试了微梁的静、动态三维形貌及手机芯片的翘曲变形.该项研究为MEMS结构的三维形貌测试提供了高精度且简单快速的测量手段.
孙伟刘雯雯康新何小元
关键词:计量学微机电系统三维形貌手机芯片
显微干涉法在微结构三维形貌测试中的应用
<正>鉴于三维形貌在微结构测试领域的重要地位及显微干涉法在光学计量领域的高精度性能,开展了显微干涉法在微结构三维形貌测试中的应用研究。基于小波变换极高的去噪性能及处理无载波条纹的优点,包裹相位采用连续小波变换的方法提取。...
孙伟何小元
关键词:微结构三维形貌手机芯片
文献传递
Method for eliminating zero-order image in digital holography
2009年
For eliminating the zero-order image in digital holography, a new method using the differential of the hologram intensity instead of the hologram itself for numerical reconstruction is proposed. This method is based on digital image processing. By analyzing the spatial spectrum of the off-axis digital hologram, it theoretically proves that the zero-order image can be effectively eliminated by differential before reconstruction. Then, the detected hologram is processed in the program with differential and reconstruction. Both the theoretical analysis and digital reconstruction results show that it can effectively eliminate the large bright spot in the center of the reconstructed image caused by the zero-order image, improve the image quality significantly, and render a better contrast of the reconstructed image. This method is very simple and convenient due to no superfluous optical elements and requiring only one time record.
刘雯雯康新戴宜全何小元
Non-contact evaluation of the resonant frequency of a microstructure using ultrasonic wave被引量:1
2010年
This paper presents a novel non-contact method for evaluating the resonant frequency of a microstructure, Firstly, the microstructure under test is excited by ultrasonic waves. This excitation method does not impose any undefined load on the specimen like the electrostatic excitation and also this is the first actual use of ultrasonic wave for exciting a microstructure in the literature. Secondly, the amplitudes of the microstructure are determined by image edge detection using a Mexican hat wavelet transform on the vibrating images of the microstructure. The vibrating images are captured by a CCD camera when the microstructure is vibrated by ultrasonic waves at a series of discrete high frequencies (〉30 kHz). Upon processing the vibrating images, the amplitudes at various excitation frequencies are obtained and an amplitude-frequency spectrum is obtained from which the resonant frequency is subsequently evaluated. A micro silicon structure consisting of a perforated plate (192 × 192 μm) and two cantilever beams (76 × 43 μm) which is about 4 μm thickness is tested. Since laser interferometry is not required, thermal effects on a test object can be avoided. Hence, the setup is relatively simple. Results show that the proposed method is a simple and effective approach for evaluating the dynamic characteristics of microstructures.
X. KangX. Y. HeC.J. TayC. Quan
关键词:NON-CONTACT
Nonlinear static characteristics of piezoelectric unimorph bending micro actuators被引量:1
2010年
The nonlinear static characteristic of a piezoelectric unimorph cantilever micro actuator driven by a strong applied electric field is studied based on the couple stress theory.The cantilever actuator consists of a piezoelectric layer,a passive(elastic)layer and two electrode layers.First,the nonlinear static characteristic of the actuator caused by the electrostriction of the piezoelectric layer under a strong applied electric field is analyzed using the Rayleigh-Ritz method.Secondly,since the thickness of the cantilever beam is in micro scale and there exists a size effect,the size dependence of the deformation behavior is evaluated using the couple stress theory.The results show that the nonlinearities of the beam deflection increase along with the increase of the applied electric field which means that softening of the micro beam rigidity exists when a strong external electric field is applied.Meanwhile,the optimal value of the thickness ratio for the passive layer and the piezoelectric layer is not around 1.0 which is usually adopted by some previous researchers.Since there exists a size effect of the micro beam deflection,the optimal value of this thickness ratio should be greater than 1.0 in micro scale.
康新董萼良章定国
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