For eliminating the zero-order image in digital holography, a new method using the differential of the hologram intensity instead of the hologram itself for numerical reconstruction is proposed. This method is based on digital image processing. By analyzing the spatial spectrum of the off-axis digital hologram, it theoretically proves that the zero-order image can be effectively eliminated by differential before reconstruction. Then, the detected hologram is processed in the program with differential and reconstruction. Both the theoretical analysis and digital reconstruction results show that it can effectively eliminate the large bright spot in the center of the reconstructed image caused by the zero-order image, improve the image quality significantly, and render a better contrast of the reconstructed image. This method is very simple and convenient due to no superfluous optical elements and requiring only one time record.
This paper presents a novel non-contact method for evaluating the resonant frequency of a microstructure, Firstly, the microstructure under test is excited by ultrasonic waves. This excitation method does not impose any undefined load on the specimen like the electrostatic excitation and also this is the first actual use of ultrasonic wave for exciting a microstructure in the literature. Secondly, the amplitudes of the microstructure are determined by image edge detection using a Mexican hat wavelet transform on the vibrating images of the microstructure. The vibrating images are captured by a CCD camera when the microstructure is vibrated by ultrasonic waves at a series of discrete high frequencies (〉30 kHz). Upon processing the vibrating images, the amplitudes at various excitation frequencies are obtained and an amplitude-frequency spectrum is obtained from which the resonant frequency is subsequently evaluated. A micro silicon structure consisting of a perforated plate (192 × 192 μm) and two cantilever beams (76 × 43 μm) which is about 4 μm thickness is tested. Since laser interferometry is not required, thermal effects on a test object can be avoided. Hence, the setup is relatively simple. Results show that the proposed method is a simple and effective approach for evaluating the dynamic characteristics of microstructures.
The nonlinear static characteristic of a piezoelectric unimorph cantilever micro actuator driven by a strong applied electric field is studied based on the couple stress theory.The cantilever actuator consists of a piezoelectric layer,a passive(elastic)layer and two electrode layers.First,the nonlinear static characteristic of the actuator caused by the electrostriction of the piezoelectric layer under a strong applied electric field is analyzed using the Rayleigh-Ritz method.Secondly,since the thickness of the cantilever beam is in micro scale and there exists a size effect,the size dependence of the deformation behavior is evaluated using the couple stress theory.The results show that the nonlinearities of the beam deflection increase along with the increase of the applied electric field which means that softening of the micro beam rigidity exists when a strong external electric field is applied.Meanwhile,the optimal value of the thickness ratio for the passive layer and the piezoelectric layer is not around 1.0 which is usually adopted by some previous researchers.Since there exists a size effect of the micro beam deflection,the optimal value of this thickness ratio should be greater than 1.0 in micro scale.