The relationship between texture and elastic properties of chemical vapor deposition (CVD) diamond films was analyzed based on the phenomenological theory, which reveals the influence of crystalline orientation and texture on the residual macro-strain and macro-stress. The phenomenological calculations indicated that the difference in Young's modulus could be 15% in single dia-mond crystals and 5% in diamond films with homogeneously distributed strong fiber texture. The experimentally measured residual strains of free-standing CVD diamond films were in good agreement with the correspondingly calculated Young's modulus in con-nection with the multi-fiber textures in the films, though the difference in Young's modulus induced by texture was only around 1%. It is believed that texture should be one of the important factors influencing the residual stress and strain of CVD diamond films.
