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国家高技术研究发展计划(2007AA03Z401)

作品数:6 被引量:16H指数:2
相关作者:赵德刚种明苏艳梅王晓勇颜廷静更多>>
相关机构:中国科学院更多>>
发文基金:国家自然科学基金国家高技术研究发展计划国家重点基础研究发展计划更多>>
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The effects of sapphire nitridation on GaN growth by metalorganic chemical vapour deposition
2011年
In situ optical reflectivity measurements are employed to monitor the GaN epilayer growth process above a low-temperature GaN buffer layer on a c-plane sapphire substrate by metalorganic chemical vapour deposition.It is found that the lateral growth of the GaN islands and their coalescence are promoted in the initial growth stage if optimized nitridation time and temperature are selected when the substrate is pre-exposed to ammonia.As confirmed by atomic force microscopy observations,the quality of the GaN epilayers is closely dependent on the surface morphology of the nitridated buffer layer,especially grain size and nucleation density.
乐伶聪赵德刚吴亮亮邓懿江德生朱建军刘宗顺王辉张书明张宝顺杨辉
关键词:化学气相沉积法外延层生长蓝宝石衬底有机金属
283nm背照射p-i-n型AlGaN日盲紫外探测器被引量:8
2013年
实验中使用在蓝宝石衬底上用低压金属有机化学气相沉积(MOCVD)生长的AlGaN基p-i-n结构材料,通过对工艺流程的优化设计,制作了背照射p-i-n型AlGaN日盲紫外探测器,获得了较高的外量子效率。材料中p区和i区的Al组分为40%,n区Al组分为65%。探测器为直径500μm的圆形,光谱响应起止波长为260~310 nm,峰值响应波长283 nm。零偏压下,暗电流密度为2.7×10-10Acm-2,对应的R0A参数为3.8×108Ωcm2,峰值响应率为13 mA/W,对应的峰值探测率为1.97×1012cmHz1/2W-1。其在-7 V偏压下,峰值响应率达到148 mA/W,对应的外量子效率达到63%。
王晓勇种明赵德刚苏艳梅
关键词:紫外探测器ALGAN日盲量子效率
246nm p-i-n型背照AlGaN太阳盲紫外探测器的研制被引量:6
2011年
设计并制备出短波长p-i-n型背照AlGaN太阳盲紫外探测器,响应波段为225~255 nm,峰值波长为246nm。材料为在蓝宝石衬底上生长的背照式p-i-n型异质结结构,n型窗口层的AlxGa1-xN中的Al组分为71%,非故意掺杂吸收层中的Al组分为52%。零偏压下测得的暗电流为27 pA,光电流为2.7 nA,峰值响应度为23 mA/W。并在此基础上制备出大面阵太阳盲紫外探测器芯片,其像元数为128×128,光敏元直径为44μm,像元间距为50μm。
颜廷静种明赵德刚张爽陈良惠
关键词:ALGAN紫外探测器面阵
p-GaN/p-AlxGa1-xN异质结界面处二维空穴气的性质及其对欧姆接触的影响被引量:2
2012年
通过自洽求解一维泊松方程和薛定谔方程,得到了p-GaN/p-Al_xGa_(1-x)N异质结界面处的价带结构和二维空穴气(2DHG)分布,研究了A1组分和压电极化效应对界面处2DHG性质的影响,给出了异质界面处2DHG的面密度、浓度分布以及价带结构.实验结果表明:随着Al组分的增加,异质结界面处势阱明显加深变窄,这使得2DHG的峰值密度加速上升,也使得面空穴密度近直线上升;压电极化效应也明显使界面处势阱加深变窄,并且使费米能级向势垒顶端移动,峰值浓度的位置向界面处移动;另外,价带带阶高度和受主杂质浓度对2DHG的影响较小.利用这层2DHG制作的p-Al_xGa_(1-x)N的欧姆接触,电流电压特性明显好于直接制作的电极,说明了2DHG可以显著改善p-Al_xGa_(1-x)N的欧姆接触性能.
王晓勇种明赵德刚苏艳梅
关键词:压电极化欧姆接触
Simulation of the light extraction efficiency of nanostructure light-emitting diodes
2011年
The light extraction efficiencies have been calculated for various InGaN/GaN multiple quantum well nanostructure light-emitting diodes including nanopillar,nanorough of P-GaN surface,coreshell and nano-interlayer structure.From the calculated results we can see that the light extraction efficiency is remarkably improved in the nanostructures,especially those with an InGaN or AlGaN nano-interlayer.With a 420-nm luminescence wavelength,the light extraction efficiency can reach as high as 65% for the InGaN or AlGaN nano-interlayer structure with appropriate In or Al content while only 26% for the planar structure.
朱继红王良吉张书明王辉赵德刚朱建军刘宗顺汪德生杨辉
关键词:光提取效率INGAN夹层结构氮化铟镓
Role of Ga vacancies in enhancing the leakage current of GaN Schottky barrier ultraviolet photodetectors被引量:1
2010年
The leakage current of GaN Schottky barrier ultraviolet photodetectors is investigated.It is found that the photodetectors adopting undoped GaN instead of lightly Si-doped GaN as an active layer show a much lower leakage current even when they have a higher dislocation density.It is also found that the density of Ga vacancies in undoped GaN is much lower than in Si-doped GaN.The Ga vacancies may enhance tunneling and reduce effective Schottky barrier height,leading to an increase of leakage current.It suggests that when undoped GaN is used as the active layer,it is necessary to reduce the leakage current of GaN Schottky barrier ultraviolet photodetector.
赵德刚张爽刘文宝郝小鹏江德生朱建军刘宗顺王辉张书明杨辉魏龙
关键词:肖特基势垒紫外探测器位错密度势垒高度
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