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国家自然科学基金(61376117)

作品数:2 被引量:4H指数:1
相关作者:董林玺更多>>
相关机构:杭州电子科技大学更多>>
发文基金:国家自然科学基金更多>>
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工艺误差对盘式耦合谐振滤波器的影响被引量:4
2018年
MEMS谐振器采用阵列耦合设计可以降低运动电阻、提高功率处理能力等,但是阵列耦合谐振器的性能对于耦合梁结构特性非常敏感,据此分析工艺误差造成的耦合梁形状变化对圆盘阵列耦合谐振器滤波性能的影响。对耦合梁不同程度倾斜下的谐振滤波器结构和性能参数进行理论分析,并采用有限元仿真软件ANSYS进行模拟仿真。结果表明当耦合梁分别发生0.1°、0.2°、0.5°倾斜时,滤波器中心频率分别下偏10×10^(-6)、24×10-6、51×10-6。当倾斜角达到0.5°时,分数带宽偏差将达到5.6%。提出了一种半高耦合梁的圆盘阵列谐振滤波器,其滤波器性能稳定性要4×优于常规型圆盘耦合谐振滤波器。
李豪郑梦萍董林玺
Analysis of reliability factors of MEMS disk resonator under the strong inertial impact
2014年
Increasing the bias voltage is a method of reducing the motional resistance of the capacitive disk res- onator to match the impedance of the RF circuit. But there are few reports on the study of reliable working range of bias voltage under the shock and vibration environment. Therefore, the reliability of disk resonator under the step and pulse acceleration impact respectively is systematically analyzed in this paper. By the expression of the biggest inertial acceleration the disk can bear under the reliable condition, the maximal reliable range curves of the disk resonator under the dynamic impact environment are obtained. According to the actual sizes of disk in the literature, it can be seen that when a step shock of 13000g is supplied, the reliability range is reduced to 75% compared with the original state. For the pulse shock, the reliability range is related to the pulse amplitude and time width. Research of this paper can provide the basis for the selection of bias voltage of disk resonator under the inertial shock.
董林玺俞权包金艳陶家平
关键词:RELIABILITY
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