TiAlCrN coatings were deposited by means of vacuum cathodic arc ion plating technique on TC 11 （Ti-6.5Al-3.5Mo-1.5Zr-0.3Si） titanium alloy substrates. The composition, phase structure, mechanical performance, and oxidation-resistance of the nivide coatings were investi- gated by scanning electron microscopy （SEM）, atomic force microscope （AFM）, X-ray diffraction （XRD）, auger electron spectroscopy （AES）, and X-ray photoelectron microscopy （XPS）. A new process for preparing protective coatings of the titanium alloy is successfully ac- quired. The experimental results indicate that the added element chromium in the TiAlN coatings make a contribution to form the （220） pre- ferred direction. The phases of the coatings are composed of （Ti,Al）N and （Ti,Cr）N. After 700~C and 800~C oxidation, AES analysis shows that the diffusion distribution of the TiAlCrN coatings emerges a step shape. From the outside to the inner, the concentrations of O, Al, and Cr reduce, but those of Ti and N increase. The Al-rich oxide is formed on the surface of the coatings, and the mixed structure of Ti-rich and Cr-rich oxides is formed in the internal layer. The oxidation resistance of the TiAlCrN coatings is excellent at the range of 700 to 800~C. Adhesion wear is the dominant mechanical characteristic for the titanium alloy at room temperature, and the protective coatings with high hardness can improve the mechanical properties of the titanium alloy. The wear resistance of the TC 11 alloy is considerably improved by the TiAlCrN coatings.
采用射频TCP(Transverse coup led p lasm a)等离子体辅助电子枪蒸发技术首次在室温下制备了氮化铝薄膜,用傅立叶变换红外光谱仪分析了氮化铝薄膜红外光谱的特性.利用朗缪尔静电单探针诊断了射频TCP离子束辅助电子枪蒸发镀膜装置反应室内等离子体密度的空间分布规律,并分析了气压对等离子体分布的影响.离子源口等离子体密度较大,但分布不均匀;反应室内等离子体迅速扩散,密度变小,分布趋向于均匀.
