This paper addresses double-loop robust tracking controller design of the miniaturized linear motor drive precision stage with mass and damping ratio uncertainties.As an inner-loop,a disturbance observer(DOB) is employed to suppress exogenous low frequency disturbances such as friction and cutting force.To further eliminate the residual disturbance and to guarantee the robust tracking to the reference input,a-synthesis outer-loop controller is designed.For eliminating the steady state error,a technique is proposed to design the-synthesis outer-loop controller with an integrator.A guideline to select the bandwidth of the Q-filter in the DOB is provided.Simulations using a model of a prototype micro-milling machine indicate that the proposed outer-loop synthesis scheme is superior to the H suboptimal control in disturbance rejection performance and steady state tracking performance.Furthermore,it is shown experimentally that the proposed double-loop robust tracking controller improves the tracking performance of the stage by 29.6% over PID control with a DOB inner-loop.
