A micro direct methanol fuel cell （μDMFC） using MEMS technology is reported. The prototype features a unique 3D air-breathing cathode structure fabricated using KOH etching and double-side lithography. The optimization of the MEMS fabrication process is analyzed. The experimental results show the prototype generates a maximum power density of 2.52mW/cm^2 at room temperature. This performance is better than the published resuits of other silicon-based passive μDMFCs. Moreover,it is comparable with that of our previous active μDMFCs which require an external pump, certificating the feasibility of this new configuration.
