In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system （MEMS） gyroscope are analyzed in principle. A novel drive circuit for the MEMS gyroscope in digital closed-loop control is proposed, which utilizes a digital phase-locked loop （PLL） in frequency control and an automatic gain control （AGC） method in amplitude control. A digital processing circuit with a field programmable gate array （FPGA） is designed and the experiments are carried out. The results indicate that when the temperature changes, the drive frequency can automatically track the resonant frequency of gyroscope in drive mode and that of the oscillating amplitude holds at a set value. And at room temperature, the relative deviation of the drive frequency is 0.624 ×10^-6 and the oscillating amplitude is 8.0 ×10^-6, which are 0. 094% and 18. 39% of the analog control program, respectively. Therefore, the control solution of the digital PLL in frequency and the AGC in amplitude is feasible.
The temperature characteristics of a silicon microgyroscope are studied, and the temperature compensation method of the silicon microgyroscope is proposed. First, an open-loop circuit is adopted to test the entire microgyroscope＇s resonant frequency and quality factor variations over temperature, and the zero bias changing trend over temperature is measured via a closed-loop circuit. Then, in order to alleviate the temperature effects on the performance of the microgyroscope, a kind of temperature compensated method based on the error back propagation（BP）neural network is proposed. By the Matlab simulation, the optimal temperature compensation model based on the BP neural network is well trained after four steps, and the objective error of the microgyroscope＇s zero bias can achieve 0.001 in full temperature range. By the experiment, the real time operation results of the compensation method demonstrate that the maximum zero bias of the microgyroscope can be decreased from 12.43 to 0.75（°）/s after compensation when the ambient temperature varies from -40 to 80℃, which greatly improves the zero bias stability performance of the microgyroscope.
