Electron cyclotron resonance radio frequency (ECR-rf) hybrid krypton-diluted oxygenplasmas were used to pattern the surfaces of diamond films with the assistance of a physicalmask, while optical emission spectroscopy was employed to characterize the plasma. It was foundthat with krypton dilution the etching rate decreased, and also the aspect ratios of nanotips formedin micro-holes were significantly modified. The oxygen atomic densities were estimated by oxygenatom optical emission and argon actinometry. Under a microwave power of 300 W and rf biasof-300 V, the absolute density of ground-state oxygen atoms decreased from 1.3×10^(12) cm^(-3) to1.4×10^(11) cm^(-3) as the krypton dilution ratio increased to 80%, accompanied by the decrease inthe plasma excitation temperature. It is concluded that oxygen atoms play a dominant role indiamond etching. The relative variations in the horizontal and vertical etching rates induced bythe addition of krypton are attributed to the observations of thicker nanotips at a high kryptondilution ratio.
In this article we present ideas of providing appropriate poloidal magnetic field for helimaks to help to generate toroidal magnetic plasma torus.Placing a conductive ring in the center of the cross-section to induce a suitable current,we change the helical magnetic field lines in the helimak discharge into magnetic surface.In this kind of discharge,the plasma density is greatly increased,and the corresponding density fluctuation is significantly decreased,showing a better confinement by magnetic shear.It allows more flexible and efficient experimental investigations on the toroidal magnetic confinement plasmas to be carried on in this kind of device.
Plasma absorption probe (PAP) was developed for measuring the electron density inplasmas processing based on the surface-wave characteristics. In order to diagnose the plasma withlower density and higher pressure, a sensitive PAP was also developed. Both types of PAP wereanalyzed theoretically under the quasi-static approximation, which is highly problematic when aconductor exists in the resonance region of the probe. For this reason, a theoretical model for thePAP is presented in this paper. The model is derived from the electromagnetic wave equation.Its principle is then verified via experiments and numerical simulations. Both experimental andnumerical results show that the electromagnetic theoretical model is valid as compared with thequasi-static model. Consequently, a new type of PAP, named as the electromagnetic PAP, is thusproposed for the measurement of electron density.
