Tungsten alloy with special properties is a useful material in medical and weapon devices.Surface modification of ion technique is used to improve the surface hardness and wear resistance of tungsten alloy,where carbon films deposited with magnetron sputtering on the surface of tungsten alloy were bombarded by ion beam with different species.AES and XPS analyses for these speciment show that tungsten carbide and tungsten nitride were formed due to N-+ bombardment.Which is beneficial to the Surface hardness and wear resistance of tungsten alloy,but no carbide or no nitride as above with other ion species.Again,ion bombardness leads to mixing between the carbon and tungsten alloy hence improve the adhere of carbon film to the substrate.
