The fabrication and electrical characterization of Scho tt ky barrier diodes (SBD) on 6H-SiC,via thermal evaporation of Ni are reported.Th e Schottky barrier diodes are fabricated during the 6H-SiC epilayers grow n by using chemical vapor deposition on commercially available single-crystal 6 H-SiC wafers.The I-V characteristics of these diodes exhibit a sharp break down,with the breakdown voltage of 450V at room temperature.The diodes are demon strated to be of a low reverse leakage current of 5×10 -4 A·cm -2 at the bias voltage of -200V.The ideal factor and barrier height are 1 09 and 1 24-1 26eV,respectively.
提出了一种考虑 Schottky结势垒不均匀性和界面层作用的 Si C Schottky二极管 ( SBD)正向特性模型 ,势垒的不均匀性来自于 Si C外延层上的各种缺陷 ,而界面层上的压降会使正向 Schottky结的有效势垒增高 .该模型能够对不同温度下 Si C Schottky结正向特性很好地进行模拟 ,模拟结果和测量数据相符 .它更适用于考虑器件温度变化的场合 ,从机理上说明了理想因子、有效势垒和温度的关系 .
