The C 3N 4 film on Al 2O 3 formed by dynamic catalytic at low energy Ar + ion sputtering C 3H 6N 6+Ni target. The ratio of nitroge atoms to carbon in the films is 4∶3. C(1 s ) peakes for graphite, diamond and C≡N not have observed. above results are obtained by XPS. The main peak appears at 1275cm -1 in the Raman spectrum. Results of SEM cant observed that sample is consist of cluter type crystal, but is no needle type. The colour is yellow but is no white. The experimental result indicated films consist of inorganic cavalent solid carbon nitride. The results from XRF observed sample contain Fe and Ni elements. It has been illustrated that Fe and Ni responsible for one C 3N 4 polymerization.
