Nd-doped MoN was prepared by thermal permeation of rare earth Nd in MoN using FeMo6 as the precursor. XRD, DTA, XPS and XRF have been used to characterize the FeMo6 precursor and the thermal treated samples. XRD, XPS and XRF results show that FeMo6 structure is decomposed and Nd-doped MoN is formed during the thremal treatment. XPS results also give the evidence that it is Nd3+ ion that can be permeated into the bulk of MoN. The conductivity of MoN is increased from 0.228 S·cm-1 to 2.649 × 102 S·cm-1 by Nd doping.
