Determination of thirty four trace metal elements in electronic high purity hydrochloric acid by ICP-MS (Standard Condition, Plasma Screen Condition) with membrane desolvation was described. Matrix effects were compensated by adding rhodium as the internal standard. Detection limits is 0.1 to 100 ng/L; the recovery of the method is 90%-110%. Long term RSD was less than 5%. The results from ICP and ICP-MS are correspondent. ICP-MS improves the accuracy and efficiency of analyses.
