High field asymmetric wave ion mobility spectrometry （FAIMS） is a powerful tool to detect and characterize gas-phase ions, while the unsolvable partial differential equation of ions moving in ion drift tube poses a big challenge to FAIMS spectral peak analysis. In this work, a universal and effective model of FAIMS spectral peak profile has been proposed by introducing ion trajectory and loss height. With this model, the influence of the structure of ion drift tube, dispersion voltages, compensation voltages, and carrier gas flow rate on the FAIMS spectral peak characteristics like peak shape, full width at half maximum and peak height is analyzed and discussed. The results show that the influence of different factors on the FAIMS spectral peak profile can be qualitatively described by the model which agrees with the experimental data.
